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ASTM Selected Technical Papers
Energy Dispersion X-Ray Analysis: X-Ray and Electron Probe Analysis
By
JC Russ
JC Russ
1
Jeolco (USA), Inc.
,
Medford, Mass. 02155
;
symposium chairman
.
Search for other works by this author on:
ISBN-10:
0-8031-0070-1
ISBN:
978-0-8031-0070-1
No. of Pages:
287
Publisher:
ASTM International
Publication date:
1971

Limitations on light element analysis include the low fluorescent yield of low atomic number elements and the interference of closely spaced K-lines and the L- and M-lines of heavier elements. The paper discusses the relative contributions of electronic noise and statistical line width for low-energy X-rays and the effect of detector window thickness, along with the possibility of reducing or eliminating the window. Optimum accelerating voltages for light elements are calculated, and the importance of takeoff angle is stressed. Examples are given of the minimum detectable limits obtainable at the present state of the art; the possibilities for development in the near future are discussed.

1.
Elad
,
E.
 et al
, “
The Use of an Energy Dispersive X-ray Analyzer in Scanning Electron Microscopy
,”
1969 Nuclear Science Symposium
,
Institute of Electrical and Electronic Engineers
.
2.
Burhop
,
The Auger Effect
,
Cambridge University Press
,
Cambridge, England
,
1952
.
3.
Rossland
,
Philosophical Magazine
 1478-6435, Vol.
45
,
1923
, p. 65.
4.
Sutfin
,
L.
and
Ogilvie
,
R.
, Paper 54,
Proceedings of the 4th National Conference on Electron Microprobe Analysis
,
1969
.
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