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ASTM Selected Technical Papers
Energy Dispersion X-Ray Analysis: X-Ray and Electron Probe Analysis
By
JC Russ
JC Russ
1
Jeolco (USA), Inc.
,
Medford, Mass. 02155
;
symposium chairman
.
Search for other works by this author on:
ISBN-10:
0-8031-0070-1
ISBN:
978-0-8031-0070-1
No. of Pages:
287
Publisher:
ASTM International
Publication date:
1971

Semiconducting X-ray detectors with low noise and high resolution have recently become available for the less than 20 keV range which is the region of interest encountered in the examination of X-rays produced in the electron microprobe analyzer. Although their energy resolution is generally less than that of crystal spectrometers, they offer special advantages including simultaneous collection of all detectable X-ray signals, high collection efficiencies, wavelength measurement independent of specimen position, and rapid collection of data in a form compatible with computer processing. Added to an electron microprobe, they provide a method of detecting in several minutes all elements with atomic number greater than sodium and present in quantities as small as a few tenths of a percent. Quantitative analyses are possible provided care is exercised in evaluating background spectra and peak overlap.

1.
Fitzgerald
,
R.
,
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,
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, and
Heinrich
,
K.
,
Science
 0036-8075, Vol.
159
,
1968
, p. 528.
2.
Russ
,
J.
and
Kabaya
,
A.
,
Proceedings, Second Annual Scanning Electron Microscope Symposium
,
Chicago, Ill.
, 29 April–1 May 1969, p. 59.
3.
Solomon
,
J. L.
, “
Spatial Concentration Display and Mapping
,”
Fourth National Conference on Electron Microprobe Analysis
,
Pasadena, Calif.
, 16–18 July 1969.
4.
Proceeding of Eleventh Scintillation and Semiconductor Symposium
,
Washington, D.C.
,
Transactions, Institute of Electrical and Electronic Engineers
, NS15, No. 3,
06
1968
.
5.
Semiconductor Nuclear Particle Detector and Circuits
,
Brown
,
W. L.
et al, eds., Publication 1593,
National Academy of Science
,
Washington, D.C.
,
1969
.
6.
Sutfin
,
L. V.
,
Ogilvie
,
R. E.
, and
Harris
,
R. S.
, “
Selection of Optimum Pulse Height Analysis Window
,”
Fourth National Conference on Electron Microprobe Analysis
,
Pasadena, Calif.
, 16–18 July 1969.
7.
Ziebold
,
T. O.
,
Analytical Chemistry
 0003-2700, Vol.
39
,
1967
, p. 858.
8.
Ziebold
,
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and
Ogilvie
,
R. E.
,
Analytical Chemistry
 0003-2700, Vol.
36
,
1964
, p. 322.
9.
Savitzky
,
A.
and
Golay
,
M.
,
Analytical Chemistry
 0003-2700, Vol.
36
,
1964
, p. 1627.
10.
Barnes
,
V.
,
IEEE Transactions
, NS15, No.
3
,
1968
, p. 437.
11.
Handbook of X-Rays
,
Kaeble
,
E. F.
, ed.,
McGraw-Hill
,
N.Y.
,
1967
.
12.
Myklebust
,
R. L.
and
Heinrich
,
K. F. J.
, “
Qualitative and Semi-Quantitative Analysis with Non-Dispersive X-Ray Detectors
,”
Fourth National Conference on Electron Microprobe Analysis
,
Pasadena, Calif.
, 16–18 July 1969.
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