11R16. MEMS Handbook. - Edited by M Gad-el-Hak (Dept of Aerospace and Mech Eng, Univ of Notre Dame, Notre Dame IN 46556). CRC Press LLC, Boca Raton FL. 2002. 1368 pp. ISBN 0-8493-0077-0. $149.95
Reviewed by WE Seemann (Dept of Mech and Process Eng, Univ of Kaiserslautern, PO 3049, Kaiserslautern, 67653, Germany).
The MEMS Handbook is a collection of 36 chapters, each subdivided in several sections and covering a special subject or topic, and almost each is written by one or more different authors. As every of the 54 contributors has his own field of knowledge and expertise, this book is a good collection of subjects within the area of micro-electromechanical-systems (MEMS).
The book is divided into four parts. Part I covers the background and fundamentals of MEMS, including flow phenomena, physics of thin films, bubble/drop transport, control theory,...