For micro/nanosized contact problems, the influence of surface tension becomes prominent. Based on the solution of a point force acting on an elastic half space with surface tension, we formulate the contact between a rigid ellipsoid and an elastic substrate. The corresponding singular integral equation is solved numerically by using the Gauss–Chebyshev quadrature formula. When the size of contact region is comparable with the elastocapillary length, surface tension significantly alters the distribution of contact pressure and decreases the contact area and indent depth, compared to the classical Hertzian prediction. We generalize the explicit expression of the equivalent contact radius, the indent depth, and the eccentricity of contact ellipse with respect to the external load, which provides the fundament for analyzing nanoindentation tests and contact of rough surfaces.

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