This paper presents the nonlinear large deflection of the thin film and the effect of substrate deformation on the thin film deflection through the shaft-loaded blister test. The blister of thin film can be divided into two parts, namely, the annular contact brim and the central noncontact bulge. A two-coupled line spring model is developed to describe the deformation of the contact part, and Föppl–Hencky equations are employed to study the constitutive relation between the applied load and the central deflection. The analytical and numerical solutions for the constitutive relation between the applied load and the deflection of thin film with considering the deformation of substrate are derived.

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