The mechanics of thin film epitaxy is developed using an equilibrium thermodynamics formalism and linear elasticity. A virtual variation approach is employed that leads to a direct identification of the important volume and surface thermodynamic parameters characterizing mechanical equilibrium. In particular, the equilibrium volume stress state of an epitaxial film as a function of the film thickness, surface free energies, and surface stresses is obtained. It is shown how this formalism can be used to determine the critical thickness for epitaxy.
Issue Section:
Technical Papers
Keywords:
thermodynamics,
free energy,
epitaxial layers,
surface energy,
stress analysis,
elasticity
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.Copyright © 2002
by ASME
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