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Keywords: capillary force
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Proceedings Papers
Proc. ASME. WTC2005, World Tribology Congress III, Volume 2, 733-734, September 12–16, 2005
Publisher: American Society of Mechanical Engineers
Paper No: WTC2005-63203
... with higher surface energy have higher adhesive forces. One efficient way to avoid stiction in silicon microstructures is to deposit a thin fluorocarbon film coating. capillary force stiction/adhesion MEMS materials nano-scale adhesive forces Proceedings of WTC2005 World Tribology Congress III...
