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Keywords: MEMS materials
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Proceedings Papers
Proc. ASME. WTC2005, World Tribology Congress III, Volume 2, 733-734, September 12–16, 2005
Publisher: American Society of Mechanical Engineers
Paper No: WTC2005-63203
... 19 11 2008 Adhesion and stiction are serious problems in microelectromechanical systems (MEMS) fabrication and application. The wettability, surface energies, and nano-scale adhesive forces of commonly used MEMS materials have been examined by contact angle meter and atomic force...
