A novel quantitative nano+micro-tribometer with integrated nanoindenter, SPM and optical microscope imaging has been used to characterize mechanical properties of Cu coated Si wafers at various test stages. A 2D Finite Element Model was developed to study changes on workhardened contacts assessed via nanoindentation experiments.
Volume Subject Area:
Micro- and Nanotribology
This content is only available via PDF.
Copyright © 2005
by ASME
You do not currently have access to this content.