Despite progresses achieved in the technology of MEMS, the tribological problem continues being an unresolved matter. Wear and stick-slip phenomena are many times the origin of failure of these devices. The application of self-assembled monolayers (SAMs) in liquid phase seems to be a solution to this problems. SAMs of octadecyltrichlorosilane (CH3(CH2)17SiCl3, OTS) were attached to Si(100) oxidized in liquid phase. Contact angle measurements were used for characterizing the grade of hydrophobicity. The topography of the coating was obtained with an Atomic Force Microscopy (AFM) in semicontact mode. The images showed the presence of particles related to the polymerization of the precursor molecule during the formation process of the SAMs. Creating the film of lubricant in vapour phase would avoid this undesirable effect. Tribological tests were carried out with a microtribometer in linear reciprocating movement with a ball of 2 mm of diameter (100Cr6 and Si3N4) and load of some milinewtons. Results were compared with those obtained for silicon oxidized without any coating. The coefficient of friction (COF) and wear (substrate and ball) were studied under different test conditions.
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World Tribology Congress III
September 12–16, 2005
Washington, D.C., USA
Conference Sponsors:
- Tribology Division
ISBN:
0-7918-4202-9
PROCEEDINGS PAPER
Micro/Nano-Tribological Behavior of Octadecyltrichlorosilane on Silicon as a Coating for MEMS Available to Purchase
B. Coto
B. Coto
Tekniker, Otaola, Spain
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J. Barriga
Tekniker, Otaola, Spain
B. Ferna´ndez
Tekniker, Otaola, Spain
E. Abad
Tekniker, Otaola, Spain
B. Coto
Tekniker, Otaola, Spain
Paper No:
WTC2005-63491, pp. 759-760; 2 pages
Published Online:
November 17, 2008
Citation
Barriga, J, Ferna´ndez, B, Abad, E, & Coto, B. "Micro/Nano-Tribological Behavior of Octadecyltrichlorosilane on Silicon as a Coating for MEMS." Proceedings of the World Tribology Congress III. World Tribology Congress III, Volume 2. Washington, D.C., USA. September 12–16, 2005. pp. 759-760. ASME. https://doi.org/10.1115/WTC2005-63491
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