Friction characteristics of self-assembled monolayers (SAMs) coated on Si-wafer by chemical vapor deposition technique was studied at nano-scale using AFM, and at micro-scale using micro-tribo tester. Three self-assembled monolayers, such as diphenyldichlorosilane, dimethyldichlorosilane and perfluorodecanoicacid, were tested in this work. Results showed that SAMs exhibited superior frictional property than Si-wafer. Friction in the case of Si-wafer was significantly affected by its inherent adhesion, and in the case of SAMs by their physical/chemical properties. At micro-scale, the effect of ball size on coefficient of friction of the test materials was also investigated.

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