A Data Correction Method for the Dynamic Measurements by the Atomic Force Microscope

This paper clarified the discrepancies between theoretical vibration amplitude of a cantilever used in the atomic force microscope (AFM) and the measured vibration data through the optical lever method. It was theoretically found that the amplitude data of the cantilever in the dynamic mode needs to be corrected and correction factors were newly derived. The correction factors depend on the vibration frequency and the amplitude should be corrected by about 9% at the 1st natural frequency and by about 69% at the 2nd natural frequency. This result can be applied to many AFM in which the optical lever method is used.