We have designed and fabricated two kinds of micro devices. The mechanisms of the micro devices and some experimental results using the micro devices are described in this paper. The first device is a three-dimensional (3D) microstage and the other is a lateral force sensor. Each device was fabricated on an SOI (silicon on insulator) wafer using MEMS (micro electromechanical systems) technology. We applied these devices to an SPM (scanning probe microscope) and conducted tribology tests.

Volume Subject Area:
Micro- and Nanotribology
Topics:
Nanotribology, Scanning probe microscopy, Microelectromechanical systems, Silicon-on-insulator, Force sensors, Semiconductor wafers, Tribology
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Copyright © 2005
 by ASME
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