The effect of humidity on friction properties of carbon nitride (CNx) in nitrogen (N2) atmosphere were investigated by using a ball-on-disk tribo-tester in atmospheres with controlled humidity and oxygen concentration. It was concluded that friction coefficient in the combination of CNx/CNx and Si3N4/CNx in N2 gas atmosphere were reduced from the order of 0.1 to 0.01 by decreasing of humidity from 40% RH to 0% RH when the O2 concentration is kept below 100 ppm. Further, stability of low friction of CNx/CNx in N2 gas atmosphere was confirmed experimentally. The frictional pair of CNx/CNx provided low and a stable friction coefficient of 0.01 in 99.9% nitrogen gas condition under low relative humidity of 2% or less.

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