Fluorocyclophospazenes’ derivatives were used as modifiers for improving tribological properties of thin films prepared by sol-gel technique. Thin films were made on the base of aminopropyltriethoxysilane (APTS). All films were deposited by dip-coating method and post-treated by heat, UV radiation and low pressure of RF plasma. Chemical changes in sol-gel films during all steps of post-treatments and modifications were monitored by FT-IR spectroscopy and SIMS spectrometry. Topographies of modified surfaces were imaged by Atomic Force Microscopy (AFM). After final modification significant improvements of frictional properties were observed as well as their very good thermal stability.

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