In CMP, erosive wear regarded as one of the wear mechanisms underlying the interaction between the abrasive particles and polished surfaces can occur when materials are removed from surface collision of particles which are carried by a fluid medium. In this paper, the microscopic examination of the NiP coatings after nanoparticle impacts is performed. The experimental results indicate that craters and scratches can be observed in the surface after nanoparticle impacts, and crystal grains in nano-scale and element phosphorus concentration can be found in the sub-surface layer of the impacted surface.
Volume Subject Area:
Surface Engineering and Coatings
This content is only available via PDF.
Copyright © 2005
by ASME
You do not currently have access to this content.