This paper reports a new method of nano/micro surface-texturing and the results of systematic studies of adhesion/stiction and friction properties on the textured surfaces produced by this method. Nano/micro-textured surfaces with various roughnesses were produced by low temperature aluminum-induced crystallization of plasma enhanced chemical vapor deposited (PECVD) amorphous silicon. Adhesion/stiction experiments on these nano/microtextured and non-textured surfaces were performed using two diamond tips under predefined displacement profiles with different maximum indentation displacements. Friction experiments on the textured and non-textured surfaces were conducted using the same tips under various normal contact forces. The adhesion/stiction forces and coefficients of friction (COF) of the textured surfaces were found to be much smaller than those of non-textured surfaces.
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World Tribology Congress III
September 12–16, 2005
Washington, D.C., USA
Conference Sponsors:
- Tribology Division
ISBN:
0-7918-4202-9
PROCEEDINGS PAPER
Adhesion/Stiction and Friction Studies of Nano/Micro-Textured Surfaces Produced by Crystallization of Amorphous Silicon Available to Purchase
Hengyu Wang,
Hengyu Wang
University of Arkansas, Fayetteville, AR
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Thomas Wyrobek,
Thomas Wyrobek
Hysitron, Inc., Minneapolis, MN
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Min Zou
Min Zou
University of Arkansas, Fayetteville, AR
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Hengyu Wang
University of Arkansas, Fayetteville, AR
Li Cai
University of Arkansas, Fayetteville, AR
Dehua Yang
Hysitron, Inc., Minneapolis, MN
Thomas Wyrobek
Hysitron, Inc., Minneapolis, MN
Min Zou
University of Arkansas, Fayetteville, AR
Paper No:
WTC2005-63723, pp. 415-416; 2 pages
Published Online:
November 17, 2008
Citation
Wang, H, Cai, L, Yang, D, Wyrobek, T, & Zou, M. "Adhesion/Stiction and Friction Studies of Nano/Micro-Textured Surfaces Produced by Crystallization of Amorphous Silicon." Proceedings of the World Tribology Congress III. World Tribology Congress III, Volume 2. Washington, D.C., USA. September 12–16, 2005. pp. 415-416. ASME. https://doi.org/10.1115/WTC2005-63723
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