Selective Surface Nano/Micro-Texturing by UV Assisted Low Temperature Crystallization of Amorphous Silicon

This paper presents a novel selective surface-texturing method as well as adhesion/stiction and friction studies of the selectively-textured surface. The selective surface-texturing was accomplished by ultraviolet (UV) assisted low temperature crystallization of amorphous silicon. Adhesion/stiction experiments on the nano/micro-textured and non-textured surface areas were performed using a diamond tip under controlled displacement profiles with different maximum indentation displacements. Friction experiments on the textured and non-textured surface areas were conducted using the same tip under various normal contact forces. The adhesion/stiction forces and coefficients of friction (COF) of the textured surface areas were found to be much smaller than those of non-textured surface areas.