This paper presents a novel selective surface-texturing method as well as adhesion/stiction and friction studies of the selectively-textured surface. The selective surface-texturing was accomplished by ultraviolet (UV) assisted low temperature crystallization of amorphous silicon. Adhesion/stiction experiments on the nano/micro-textured and non-textured surface areas were performed using a diamond tip under controlled displacement profiles with different maximum indentation displacements. Friction experiments on the textured and non-textured surface areas were conducted using the same tip under various normal contact forces. The adhesion/stiction forces and coefficients of friction (COF) of the textured surface areas were found to be much smaller than those of non-textured surface areas.
Selective Surface Nano/Micro-Texturing by UV Assisted Low Temperature Crystallization of Amorphous Silicon
Wang, H, Cai, L, Yang, D, Wyrobek, T, & Zou, M. "Selective Surface Nano/Micro-Texturing by UV Assisted Low Temperature Crystallization of Amorphous Silicon." Proceedings of the World Tribology Congress III. World Tribology Congress III, Volume 1. Washington, D.C., USA. September 12–16, 2005. pp. 913-914. ASME. https://doi.org/10.1115/WTC2005-63719
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