Sol-gel process associated with integrated circuit (IC) technique was used to fabricate Lead-zirconate-titanate (PZT) films with different thickness and process parameter on Pt/Ti/SiO2/Si substrates. Meanwhile, a new dual-stage actuator system including a piezoelectric micro-actuator and a voice coil motor for positioning a magnetic head for high-density hard disc devices (HDDs) have been designed, fabricated. Fig. 1 shows the structure illustration of the micro-actuator that consists of slider, “U”-type substrate and piezoelectric multilayer elements. The crystalline structure and growth behavior of the films with different thickness have been studied by X-ray diffraction, scanning electron microscopy, and Auger electron spectroscopy. The structure of piezoelectric element is as Pt/Ti/PZT/Pt/Ti multi-layer film.
Skip Nav Destination
World Tribology Congress III
September 12–16, 2005
Washington, D.C., USA
Conference Sponsors:
- Tribology Division
ISBN:
0-7918-4201-0
PROCEEDINGS PAPER
Thickness and Processing Effects on the Composition and Actuating Force of Pb(Zr,Ti)O3 Thin-Film Micro-Actuator for Hard Disk Drives
Jianbin Luo,
Jianbin Luo
Tsinghua University, Beijing, China
Search for other works by this author on:
Tianmin Shao
Tianmin Shao
Tsinghua University, Beijing, China
Search for other works by this author on:
Yang Jing
Tsinghua University, Beijing, China
Jianbin Luo
Tsinghua University, Beijing, China
Tianmin Shao
Tsinghua University, Beijing, China
Paper No:
WTC2005-63316, pp. 691-692; 2 pages
Published Online:
November 17, 2008
Citation
Jing, Y, Luo, J, & Shao, T. "Thickness and Processing Effects on the Composition and Actuating Force of Pb(Zr,Ti)O3 Thin-Film Micro-Actuator for Hard Disk Drives." Proceedings of the World Tribology Congress III. World Tribology Congress III, Volume 1. Washington, D.C., USA. September 12–16, 2005. pp. 691-692. ASME. https://doi.org/10.1115/WTC2005-63316
Download citation file:
2
Views
0
Citations
Related Proceedings Papers
Related Articles
Preparation of CIGSS Thin-Film Solar Cells by Rapid Thermal Processing
J. Sol. Energy Eng (August,2007)
Synthesis of Coatings With Hardness Exceeding 40 GPa by Magnetron Sputtering
J. Tribol (April,1998)
Study of Fluorine-Doped Ti O 2 Sol-Gel Thin Coatings
J. Sol. Energy Eng (November,2008)
Related Chapters
Surface Analysis and Tools
Tribology of Mechanical Systems: A Guide to Present and Future Technologies
New Implications for Geo-Mechanism of the Sandstone Diagenesis, from Diagenetic Heterogeneity of Lenticular Sandbody in Shahejie Formation, Bohai Bay Basin
International Conference on Electronics, Information and Communication Engineering (EICE 2012)
QP Based Encoder Feedback Control
Robot Manipulator Redundancy Resolution