Sol-gel process associated with integrated circuit (IC) technique was used to fabricate Lead-zirconate-titanate (PZT) films with different thickness and process parameter on Pt/Ti/SiO2/Si substrates. Meanwhile, a new dual-stage actuator system including a piezoelectric micro-actuator and a voice coil motor for positioning a magnetic head for high-density hard disc devices (HDDs) have been designed, fabricated. Fig. 1 shows the structure illustration of the micro-actuator that consists of slider, “U”-type substrate and piezoelectric multilayer elements. The crystalline structure and growth behavior of the films with different thickness have been studied by X-ray diffraction, scanning electron microscopy, and Auger electron spectroscopy. The structure of piezoelectric element is as Pt/Ti/PZT/Pt/Ti multi-layer film.

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