The notorious coupling of adhesion and residual membrane stress on the bridge of a MEMS-RF-switch and its effects on stiction failure are investigated. The previous model [1] of a thin flexible circular membrane with zero stiffness is here extended to thick stiff plate under bending. The mechanics of a film delaminating from a substrate is rigorously constructed based on an energy balance.

Volume Subject Area:
Contact Mechanics and Friction
Topics:
Stiction, Stress, Membranes, Adhesion, Bridges (Structures), Energy budget (Physics), Failure, Microelectromechanical systems, Stiffness, Switches
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Copyright © 2005
 by ASME
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