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Proceedings Papers

Pre-Stressed Piezoelectric Bimorph Micro-Actuators Based on Machined 40-Micron PZT Ceramic Thick Films—Batch Scale Fabrication and Integration With MEMS

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Stephen Wilson, Renaud Jourdain, Sam Owens
Proc. ASME. SMASIS2009, Volume 2: Multifunctional Materials; Enabling Technologies and Integrated System Design; Structural Health Monitoring/NDE; Bio-Inspired Smart Materials and Structures, 247-252, September 21–23, 2009
Publisher: American Society of Mechanical Engineers
Paper No: SMASIS2009-1303
https://doi.org/10.1115/SMASIS2009-1303
View Paper titled, Pre-Stressed Piezoelectric Bimorph Micro-Actuators Based on Machined 40-Micron PZT Ceramic Thick Films—Batch Scale Fabrication and Integration With MEMS
Open the PDF for Pre-Stressed Piezoelectric Bimorph Micro-Actuators Based on Machined 40-Micron PZT Ceramic Thick Films—Batch Scale Fabrication and Integration With MEMS in another window
Topics: Ceramics, Manufacturing, Microactuators, Microelectromechanical systems, Thick films, Actuators, Bonding, Displacement, Piezoelectric ceramics, Compression
Proceedings Papers

Pumping Performance of a Valveless Micropump Using Three-Dimensional Electro-Fluid-Structural Interaction Simulation

Available to Purchase

Van Phuoc Phan, Nam Seo Goo, Cheol Heui Han
Proc. ASME. SMASIS2008, Smart Materials, Adaptive Structures and Intelligent Systems, Volume 1, 371-377, October 28–30, 2008
Publisher: American Society of Mechanical Engineers
Paper No: SMASIS2008-474
https://doi.org/10.1115/SMASIS2008-474
View Paper titled, Pumping Performance of a Valveless Micropump Using Three-Dimensional Electro-Fluid-Structural Interaction Simulation
Open the PDF for Pumping Performance of a Valveless Micropump Using Three-Dimensional Electro-Fluid-Structural Interaction Simulation in another window
Topics: Actuators, Fluids, Micropumps, Simulation