In this work, the time and frequency response of VO2-based MEMS mirrors are characterized across the transition for individual and simultaneous actuation. First, a step input train of increasing amplitude are applied to the device up to the point of transition is reached. Second, the frequency response is measured by applying a small sinusoidal input, where the displacement remained inside the hysteresis of the VO2. The frequency of the input varied from 0.1 to 2000 Hz. The thermal dynamics of the device is found to be the factor limiting the device’s band-width to less than 10 Hz. The average resonant frequency of the present VO2-based MEMS mirror was found to be 412.5 Hz for individual actuation. These results allow for the extraction of the necessary parameters to create a model that can be used to design devices with specific dynamic performance.
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ASME 2016 Conference on Smart Materials, Adaptive Structures and Intelligent Systems
September 28–30, 2016
Stowe, Vermont, USA
Conference Sponsors:
- Aerospace Division
ISBN:
978-0-7918-5048-0
PROCEEDINGS PAPER
Experimental Characterization of the Dynamics of VO2-Based MEMS Mirrors
David Torres,
David Torres
Michigan State University, E. Lansing, MI
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Tongyu Wang,
Tongyu Wang
Michigan State University, E. Lansing, MI
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Jun Zhang,
Jun Zhang
University of California, San Diego, La Jolla, CA
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Sarah Dooley,
Sarah Dooley
Sensors Directorate at AFRL, WP-AFB, OH
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Xiaobo Tan,
Xiaobo Tan
Michigan State University, E. Lansing, MI
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Nelson Sepúlveda
Nelson Sepúlveda
Michigan State University, E. Lansing, MI
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David Torres
Michigan State University, E. Lansing, MI
Tongyu Wang
Michigan State University, E. Lansing, MI
Jun Zhang
University of California, San Diego, La Jolla, CA
Sarah Dooley
Sensors Directorate at AFRL, WP-AFB, OH
Xiaobo Tan
Michigan State University, E. Lansing, MI
Nelson Sepúlveda
Michigan State University, E. Lansing, MI
Paper No:
SMASIS2016-9129, V001T02A005; 7 pages
Published Online:
November 29, 2016
Citation
Torres, D, Wang, T, Zhang, J, Dooley, S, Tan, X, & Sepúlveda, N. "Experimental Characterization of the Dynamics of VO2-Based MEMS Mirrors." Proceedings of the ASME 2016 Conference on Smart Materials, Adaptive Structures and Intelligent Systems. Volume 1: Multifunctional Materials; Mechanics and Behavior of Active Materials; Integrated System Design and Implementation; Structural Health Monitoring. Stowe, Vermont, USA. September 28–30, 2016. V001T02A005. ASME. https://doi.org/10.1115/SMASIS2016-9129
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