Design and Fabrication of a Functionally Modified Bimorph Actuator

In recent years, the use of microelectromechanical systems (MEMS) devices has led to high performing actuators for various applications, including unmanned air vehicles (UAVs) for defense applications. The incorporation of MEMS technology in this field has resulted in miniaturized UAVs with the capability of carrying out sophisticated reconnaissance and relaying real time information remotely; however, maneuverability of these devices around obstacles is still a challenge. This paper presents the design and fabrication of a functionally modified bimorph actuator with enhanced UAV aerodynamics and maneuverability. The actuator is a metal-based MEMS device consisting of stainless steel, lead zirconate titanate (PZT), and titanium/platinum electrodes. COMSOL analysis was performed to examine optimal device design parameters and is presented in this paper. The design consists of off-axis PZT segments on a bimorph PZT layer which results in bend twist coupling. A detailed description of the fabrication process flow developed based on the optimization of the device design is also given. MEMS processing technology was incorporated to produce a torsional cantilever beam that produces angular and linear displacement for superior UAV maneuverability and its performance is also presented in this paper.