This paper introduces a simple and low cost flapping wing mechanism fabricated monolithically from SUEX dry film, an epoxy based negative photoresist similar to SU-8. The developed process has fewer steps compared to other methods, does not use precious metals, and greatly reduces processing time and cost. It simultaneously defines the PAV airframe, compliant flapping mechanism, and artificial insect wing using photolithography. Rapid prototypes were fabricated with precisely defined features and material properties and geometry that are similar to insects. A linear model with simplified aerodynamics is developed with amplitude dependent damping and validated using experimental results in air and in vacuum. Angles up to 45° at a resonant frequency of 47 Hz are observed that demonstrate applicability of the developed fabrication process for flapping wing air vehicle applications.

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