Two types of micro-mechanical memory cells are introduced in this paper. The programmable parameters are the resonant frequency of a micro-mechanical bridge and the tip deflection of a micro-mechanical cantilever. For both cases, the actuation was done by laser pulses that locally heated the vanadium dioxide (VO2) thin film coating. Due to the hysteretic behavior of the mechanical properties of the VO2 film coating across the transition, a different “memory state” was programmed with every pulse. The memory state remained programmed after the pulse ended, as long as the sample was maintained at a specific temperature (programming temperature) by using a Peltier heater. The resetting of the mechanical memory cell was accomplished by driving the temperature to regions outside the hysteretic region.

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