In this paper, we derive an exact one-dimensional rule for predicting mass loading effect due to electrodes by analyzing a FBAR structure consisting of a piezoelectric layer and two electrodes in longitudinal resonance. We validate the numerical scheme using aluminum nitride as the piezoelectric material and gold and aluminum for the top and bottom electrodes respectively. Results are compared with three-dimensional finite elements simulations obtained earlier. It is seen that the new rule predicts higher values of the resonant frequency and constitutes an improvement over an elementary rule particularly for electrodes thicknesses greater than 20% of the piezoelectric layer thickness.
- Aerospace Division
Improved Prediction of Electrodes’ Mass Loading Effect on MEMS FBAR Structure in Longitudinal Resonance
- Views Icon Views
- Share Icon Share
- Search Site
Ruimi, A, Liang, Y, & McMeeking, RM. "Improved Prediction of Electrodes’ Mass Loading Effect on MEMS FBAR Structure in Longitudinal Resonance." Proceedings of the ASME 2008 Conference on Smart Materials, Adaptive Structures and Intelligent Systems. Smart Materials, Adaptive Structures and Intelligent Systems, Volume 1. Ellicott City, Maryland, USA. October 28–30, 2008. pp. 397-402. ASME. https://doi.org/10.1115/SMASIS2008-482
Download citation file: