Microcantilever based biosensor have been the recent research interests for its versatility in data acquisition and interpretation. A microcantilever can measure the surface stress generated on any specific functional layer coating on a biochemical sensor. Berger et al.  showed the surface stress change by the alkanethiols on a probe. Fritz et al.  measured the DNA hybridization and receptor-ligand binding by a microcantilever. The surface stress measurement in the above works is mainly by measuring the microcantilever deflection based on the optical lever technique in scanning probe microscopy; however, alignment and calibration of the optical element for different testing species are by no means trivial. The technique may be futile when operating in non-transparent liquid.
- Bioengineering Division
Development of a Bridge-Microcantilever by CMOS Process for Surface Stress Measurement
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Yang, S, Chang, C, & Yin, T. "Development of a Bridge-Microcantilever by CMOS Process for Surface Stress Measurement." Proceedings of the ASME 2009 Summer Bioengineering Conference. ASME 2009 Summer Bioengineering Conference, Parts A and B. Lake Tahoe, California, USA. June 17–21, 2009. pp. 883-884. ASME. https://doi.org/10.1115/SBC2009-206333
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