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Proceedings Papers

Modeling of Spin Coating Process to Control Submicron Film Thickness of Permeation Layer

Available to Purchase

Kamal Sarkar
Proc. ASME. NEMB2010, ASME 2010 First Global Congress on NanoEngineering for Medicine and Biology, 17-18, February 7–10, 2010
Publisher: American Society of Mechanical Engineers
Paper No: NEMB2010-13083
https://doi.org/10.1115/NEMB2010-13083
View Paper titled, Modeling of Spin Coating Process to Control Submicron Film Thickness of Permeation Layer
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Topics: Film thickness, Modeling, Spin coating, Viscosity, Temperature, Electrodes, Bubbles, Assaying, Ceramics, Chemical reactions
Proceedings Papers

Shadow Edge Lithography and Application to Nanofluidics

Available to Purchase

Woon-Hong Yeo, Dong Won Lee, Kyong-Hoon Lee, Jae-Hyun Chung
Proc. ASME. NEMB2010, ASME 2010 First Global Congress on NanoEngineering for Medicine and Biology, 63-64, February 7–10, 2010
Publisher: American Society of Mechanical Engineers
Paper No: NEMB2010-13307
https://doi.org/10.1115/NEMB2010-13307
View Paper titled, Shadow Edge Lithography and Application to Nanofluidics
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Topics: Lithography, Nanofluidics, Shades and shadows, Nanoscale phenomena, Aluminum, Evaporation, Fuel cells, Microfabrication, Nanoelectronics, Nanomanufacturing