This paper deals with electrostatically actuated resonator micro- and nano-sensor for mass detection for applications in medicine and biology. Nonlinear parametric resonance of the sensor when the electrostatic actuation frequency is near natural frequency of the system is investigated. Mass deposition is included and its effect on the nonlinear behavior of the resonator is predicted.

Volume Subject Area:
NanoEngineering for Medical Diagnostics
Topics:
Biosensors, Microelectromechanical systems, Nanoelectromechanical systems, Resonance, Biology, Biomedicine, Nanosensors, Sensors
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Copyright © 2010
 by ASME
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