This paper presents the design of a MEMS-based active DEP (dielectrophoresis) cell filtration microchip for manipulating and separating biological cells. Depending on the dielectric constant and polarizability, biological cells are either attracted to or repelled from the electrodes inside a microfluidic channel. Through the optimization of electrode geometries using the finite element method (FEM), it was found that circular electrodes are capable of producing a more uniform and larger gradient of the squared electric field intensity compared to electrodes of other shapes, such as square, diamond, or triangle, FEM numerical simulation results were also used to determine 50μm as the optimal circular electrode diameter and 25μm as the optimal gap between electrodes.

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