To increase the sensitivity of a micromechanical structure to temperature (in thermal sensing) and surface stress (in biochemical sensing) change, a novel Flip-Over-Bimorph (FOB) structure has been proposed. For detecting physically induced nanoscale motion, the operation of a piston motion optomechanical sensor using the FOB design has been demonstrated. The piston motion opto-mechanical sensor has a symmetric structure such that the structural deflection is converted into a linear displacement of a reflecting surface, which is used for optical interferometry. Through the optical measurement setup using the He-Ne laser and CCD, light intensity changes for chip temperature changes are measured, and the thermo-mechanical sensitivity of the designed sensor is 180 nm/K.
ASME 4th Integrated Nanosystems Conference
September 12–14, 2005
Berkeley, California, USA
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4208-8
PROCEEDINGS PAPER
Novel Piston Motion Opto-Mechanical Sensor for Nanoscale Motion Detection
Si-Hyung “Shawn” Lim
,
Si-Hyung “Shawn” Lim
University of California at Berkeley, Berkeley, CA
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Roberto Horowitz
,
Roberto Horowitz
University of California at Berkeley, Berkeley, CA
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Arun Majumdar
Arun Majumdar
University of California at Berkeley, Berkeley, CA
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Author Information
Si-Hyung “Shawn” Lim
University of California at Berkeley, Berkeley, CA
Roberto Horowitz
University of California at Berkeley, Berkeley, CA
Arun Majumdar
University of California at Berkeley, Berkeley, CA
Paper No:
NANO2005-87077, pp. 27-28; 2 pages
Published Online:
October 15, 2008
Citation
Lim, Si-Hyung “Shawn”, Horowitz, Roberto, and Majumdar, Arun. "Novel Piston Motion Opto-Mechanical Sensor for Nanoscale Motion Detection." Proceedings of the ASME 4th Integrated Nanosystems Conference. Design, Synthesis, and Applications. Berkeley, California, USA. September 12–14, 2005. pp. 27-28. ASME. https://doi.org/10.1115/NANO2005-87077
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