In this paper we present work towards electromagnetic actuation of paramagnetic particles with three-dimensional nanocoils. Self-assembled semiconductor/metal nanocoils have been used, though the concept is applicable to other types of nancoils. The particles are paramagnetic polysterene particles with iron oxide. The feasibility of such nanoelectromagnetic actuators is investigated through nanomanipulation experiments in a scanning electron microscope (SEM). Electromagnetic fields created by nanoelectromagnets are investigated through simulation. The simulation results indicate high performance of nanocoils in terms of the achievable field gradient, a key parameter for electromagnetic actuation. Results from analysis, simulation, and experiments indicate that electromagnetic nanoactuators are feasible, and have potential applications in nanoelectromechanical systems (NEMS).

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