This paper discusses the use and creation of virtual reality based models and information oriented process models related to the study of Nanomanufacturing. EML, (which is an evolving language), was originally proposed [1] to enable the capture of information rich contexts at various levels of the manufacturing levels. In this paper, the use of EML models as a basis for describing and analyzing nano manufacturing processes will be described; their subsequent use in the creation of simulation models is also discussed. A framework for analysis, reasoning and simulation is proposed which includes a virtual reality based simulation module. Our experience in using VRML 2.0 (Virtual Reality Modeling Language) for the creation of such virtual reality environments will also be addressed.

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