We present a hybrid nano-electromechanical system for study of the mechanics of nanostructures. The system has a testing platform based on a deep reactive ion-etched high aspect ratio MEMS device. A new approach has been developed with top-down manufacturing of the micro-device and bottom-up post-fabrication assembly of samples (nanostructures) to be tested. A process that minimizes chemical or physical damage of the sample is used to integrate suspended nanowires/nanotubes into the system. The system provides nanoscale resolution of displacement and force. The device is used in an SEM and is being tested for in situ experiments on various nanowires or nanotubes.

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