A near-field optical technique, using a new type of solid immersion lens (SIL), has been developed and applied to various areas, for example, high-density optical storage, near-field-scanning-optical-microscope probes, photolithography. Solid immersion microscopy offers a method for achieving resolution below the diffraction limit in air with significantly higher optical throughput by focusing light through a high refractive-index SIL held close to a sample [1]. The minimum resolution of a focusing system is inversely proportional to numerical aperture (NA), where NA = n sinθ, θ is the maximum angle of incidence, and n is the index of refraction at the focal point. Light with vacuum wavelength λ can be focused by an aberration-free lens to a spot whose full width at half maximum (FWHM) is λ/(2 NA) in the scalar diffraction limit, equivalent to Sparrow’s criterion for spatial resolution. In a medium of refractive index n, the effective wavelength is λeff = λ/n and corresponding effective numerical aperture is NAeff = n2sinθ. When a SIL is used, improvements in NAeff and spatial resolution are proportional to the refractive index of the SIL material. Fletcher et al. demonstrated imaging in the infrared with a microfabricated SIL [1, 2]. Baba et al. analyzed the aberrations and allowances for an aspheric error, a thickness error, and an air gap when using a hemispherical SIL for photoluminescence microscopy with submicron resolution beyond the diffraction limit [3]. Terris et al. developed and applied a SIL-based near-field optical technique for the writing and reading domains in a magneto-optic material [4]. Song et al. proposed the new concept of a SIL for high density optical recording using the near-field recording technology [5]. In this paper, we propose a sub-micron scale laser processing technique with spatial resolution beyond the diffraction limit in air using near-field optics. Our goal is to eventually develop a massively parallel nano-optical direct-write nano-manufacturing technique.
Skip Nav Destination
Close
Sign In or Register for Account
ASME 2004 3rd Integrated Nanosystems Conference
September 22–24, 2004
Pasadena, California, USA
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4177-4
PROCEEDINGS PAPER
Laser Nano-Machining Using Near-Field Optics
Haseung Chung
,
Haseung Chung
University of Michigan, Ann Arbor, MI
Search for other works by this author on:
Katsuo Kurabayashi
,
Katsuo Kurabayashi
University of Michigan, Ann Arbor, MI
Search for other works by this author on:
Suman Das
Suman Das
University of Michigan, Ann Arbor, MI
Search for other works by this author on:
Haseung Chung
University of Michigan, Ann Arbor, MI
Katsuo Kurabayashi
University of Michigan, Ann Arbor, MI
Suman Das
University of Michigan, Ann Arbor, MI
Paper No:
NANO2004-46056, pp. 115-116; 2 pages
Published Online:
November 17, 2008
Citation
Chung, H, Kurabayashi, K, & Das, S. "Laser Nano-Machining Using Near-Field Optics." Proceedings of the ASME 2004 3rd Integrated Nanosystems Conference. Design, Synthesis, and Applications. Pasadena, California, USA. September 22–24, 2004. pp. 115-116. ASME. https://doi.org/10.1115/NANO2004-46056
Download citation file:
- Ris (Zotero)
- Reference Manager
- EasyBib
- Bookends
- Mendeley
- Papers
- EndNote
- RefWorks
- BibTex
- ProCite
- Medlars
Close
Sign In
3
Views
0
Citations
Related Proceedings Papers
Related Articles
Spectral Microscopy Imaging System for High-Resolution and High-Speed Imaging of Fuel Sprays
J. Eng. Gas Turbines Power (September,2020)
The Depth of Correlation in Micro-PIV for High Numerical Aperture and Immersion Objectives
J. Fluids Eng (July,2006)
Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
J. Micro Nano-Manuf (September,2017)
Related Chapters
The Marketing Research of DSC Viewfinder Technology
International Conference on Advanced Computer Theory and Engineering, 4th (ICACTE 2011)
Surface Analysis and Tools
Tribology of Mechanical Systems: A Guide to Present and Future Technologies
First Principles Process Planning for Computer-Aided Nanomanufacturing
Advances in Computers and Information in Engineering Research, Volume 1