Hypersonic Plasma Particle Deposition of Nanostructured Coatings and Micropatterns

Nanostructured materials are attractive candidates for advanced friction and wear-resistant coatings due to their potentially enhanced mechanical properties. We have developed a one-step method called hypersonic plasma particle deposition [1] to produce and deposit nanoparticles using a thermal plasma reactor. Particle synthesis is achieved by dissociating vapor phase reactants in the plasma, and quenching the hot gas in a supersonic nozzle expansion. Particles are deposited on a substrate by hypersonic impaction to form a film, or are deposited as micropatterns using a process called focused particle beam deposition [2]. In-situ particle size distribution measurements are performed using a sampling probe interfaced to an extraction/dilution system for measurement by a scanning electrical mobility spectrometer.