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Keywords: ion mill etching
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Proceedings Papers

Proc. ASME. MSEC2019, Volume 1: Additive Manufacturing; Manufacturing Equipment and Systems; Bio and Sustainable Manufacturing, V001T02A010, June 10–14, 2019
Paper No: MSEC2019-2936
... Abstract Ion Mill Etching (IME) is an advanced process technology that uses ion-beam sources to remove materials by atomic sandblasting in order to reveal a specific pattern on the substrate. The high-precision capability requires stringent process monitoring and control of the flowcool system...