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Proceedings Papers

Sustainable Analysis of Energy Consumption and Surface Quality of Monocrystalline Silicon in Diamond Wire Sawing

Eyob Messele Sefene, Chao-Chang Arthur Chen, Steve Hsueh-Ming Wang
Proc. ASME. MSEC2023, Volume 2: Manufacturing Equipment and Automation; Manufacturing Processes; Manufacturing Systems; Nano/Micro/Meso Manufacturing; Quality and Reliability, V002T06A002, June 12–16, 2023
Publisher: American Society of Mechanical Engineers
Paper No: MSEC2023-101247
https://doi.org/10.1115/MSEC2023-101247
... in reducing the energy and environmental impact of machining. In the semiconductor industry, diamond wire sawing (DWS) is a primary and time-consuming wafer fabrication process. However, the evaluation and assessment of energy consumption and carbon dioxide (CO 2 ) emission in this process have not been...
View Paper titled, Sustainable Analysis of Energy Consumption and Surface Quality of Monocrystalline Silicon in <span class="search-highlight">Diamond</span> <span class="search-highlight">Wire</span> <span class="search-highlight">Sawing</span>
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Topics: Carbon dioxide, Diamonds, Emissions, Energy consumption, Sawing, Silicon, Surface quality, Surface roughness, Sustainability, Wire