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Proceedings Papers

Simulation of Diamond Disc Conditioning in Chemical Mechanical Polishing: Effects of Conditioning Parameters on Pad Surface Shape

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Emmanuel A. Baisie, Z. C. Li, X. H. Zhang
Proc. ASME. MSEC2010, ASME 2010 International Manufacturing Science and Engineering Conference, Volume 2, 169-177, October 12–15, 2010
Publisher: American Society of Mechanical Engineers
Paper No: MSEC2010-34264
https://doi.org/10.1115/MSEC2010-34264
... 22 04 2011 Diamond disc conditioning is traditionally employed to restore pad planarity and surface roughness in chemical mechanical polishing (CMP). In this paper, a mathematic model is developed by using a surface element method to simulate and predict the pad surface shape resulted...
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Topics: Diamonds, Disks, Polishing, Shapes, Simulation