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Keywords: Chemical mechanical polishing
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Proceedings Papers

Proc. ASME. MSEC2010, ASME 2010 International Manufacturing Science and Engineering Conference, Volume 2, 169-177, October 12–15, 2010
Publisher: American Society of Mechanical Engineers
Paper No: MSEC2010-34264
... 1 Copyright © 2010 by ASME SIMULATION OF DIAMOND DISC CONDITIONING IN CHEMICAL MECHANICAL POLISHING: EFFECTS OF CONDITIONING PARAMETERS ON PAD SURFACE SHAPE Emmanuel A. Baisie Department of Industrial & Systems Engineering North Carolina Agricultural & Technical State University, Greensboro, NC...