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Proceedings Papers

Precision Evaluation of NeXus, a Custom Multi-Robot System for Microsystem Integration

Danming Wei, Alireza Tofangchi, Andriy Sherehiy, Mohammad Hossein Saadatzi, Moath Alqatamin, Keng Hsu, Dan O. Popa
Proc. ASME. MSEC2021, Volume 2: Manufacturing Processes; Manufacturing Systems; Nano/Micro/Meso Manufacturing; Quality and Reliability, V002T07A008, June 21–25, 2021
Paper No: MSEC2021-63687
DOI: https://doi.org/10.1115/MSEC2021-63687
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Topics: Microelectromechanical systems, Robots
Proceedings Papers

Functional Fiber Junctions for Circuit Routing in E-Textiles: Deterministic Alignment of MEMS Layout With Fabric Structure

Sushmita Challa, M. Shafquatul Islam, Danming Wei, Jasmin Beharic, Dan O. Popa, C. K. Harnett
Proc. ASME. MSEC2021, Volume 2: Manufacturing Processes; Manufacturing Systems; Nano/Micro/Meso Manufacturing; Quality and Reliability, V002T08A009, June 21–25, 2021
Paper No: MSEC2021-63887
DOI: https://doi.org/10.1115/MSEC2021-63887
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Topics: Algorithms, Circuits, Fibers, Junctions, Microelectromechanical systems, Textiles
Proceedings Papers

Adhesive Deposition Process Characterization for Microstructure Assembly

Andriy Sherehiy, Andres Montenegro, Danming Wei, Dan O. Popa
Proc. ASME. MSEC2021, Volume 2: Manufacturing Processes; Manufacturing Systems; Nano/Micro/Meso Manufacturing; Quality and Reliability, V002T08A012, June 21–25, 2021
Paper No: MSEC2021-63929
DOI: https://doi.org/10.1115/MSEC2021-63929
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Topics: Additive manufacturing, Adhesives, Experimental design, Manufacturing, Microassembling, Microelectromechanical systems, Printing, Fluids, Microscale devices, Silicon
Proceedings Papers

Polymeric Reaction Molding of Biocompatible Materials: Lessons Learned

Sabrina Kosnik, Davide Piovesan
Proc. ASME. MSEC2020, Volume 2: Manufacturing Processes; Manufacturing Systems; Nano/Micro/Meso Manufacturing; Quality and Reliability, V002T06A033, September 3, 2020
Paper No: MSEC2020-8465
DOI: https://doi.org/10.1115/MSEC2020-8465
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Topics: Binders (Materials), Biocompatible polymers, Biomaterials, Biomedicine, Casting, Epoxy resins, Ester, Hardening (Curing), Heat, Heat capacity
Proceedings Papers

Precision Cutting Tool Wear Monitoring Method by Knife-Edge Diffraction Interferometry

ChaBum Lee
Proc. ASME. MSEC2018, Volume 3: Manufacturing Equipment and Systems, V003T02A026, June 18–22, 2018
Paper No: MSEC2018-6463
DOI: https://doi.org/10.1115/MSEC2018-6463
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Topics: Cutting tools, Diffraction, Interferometry, Wear, Wheels, Diffraction patterns, Waves, Cutting, Damage, Microelectromechanical systems
Proceedings Papers

Graphene Growth on and Transfer From Platinum Thin Films

Joon Hyong Cho, Michael Cullinan
Proc. ASME. MSEC2017, Volume 1: Processes, V001T02A069, June 4–8, 2017
Paper No: MSEC2017-3059
DOI: https://doi.org/10.1115/MSEC2017-3059
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Topics: Graphene, Platinum, Thin films, Adhesion, Alloys, Chemical vapor deposition, Metals, Microelectromechanical systems, Nanoelectromechanical systems, Secondary ion mass spectrometry
Proceedings Papers

In-Line Dimensional Metrology for Nanomanufacturing Systems

Tsung-Fu Yao, Andrew Duenner, Michael Cullinan
Proc. ASME. MSEC2016, Volume 1: Processing, V001T02A076, June 27–July 1, 2016
Paper No: MSEC2016-8566
DOI: https://doi.org/10.1115/MSEC2016-8566
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Topics: Dimensional metrology, Nanomanufacturing, Inspection, Atomic force microscopy, Bending (Stress), Semiconductor wafers, Manufacturing, Nanoscale phenomena, Microelectromechanical systems, Actuators
Proceedings Papers

Anisotropy Effect on Cutting Monocrystal Sapphire by Micro-Laser Assisted Machining Technique

Hossein Mohammadi, John A. Patten
Proc. ASME. MSEC2016, Volume 1: Processing, V001T02A018, June 27–July 1, 2016
Paper No: MSEC2016-8652
DOI: https://doi.org/10.1115/MSEC2016-8652
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Topics: Anisotropy, Cutting, Lasers, Machining, Sapphire, Brittleness, Damage, Heating, Ceramics, Crystal structure
Proceedings Papers

A Method to Manufacture Repeatible Graphene-Based NEMS Devices at the Wafer-Scale

Joon Hyong Cho, Guoao Sun, Michael Cullinan
Proc. ASME. MSEC2016, Volume 1: Processing, V001T02A077, June 27–July 1, 2016
Paper No: MSEC2016-8567
DOI: https://doi.org/10.1115/MSEC2016-8567
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Topics: Graphene, Nanoelectromechanical devices, Semiconductor wafers, Manufacturing, Tension, Microelectromechanical systems, Actuators, Displacement, Nanomechanical resonators, Electrodes
Proceedings Papers

Tool Load Sensitivity Against Multidimensional Process Influences in Microblanking of Thin Metal Foils With Silicon Punches

Sven Hildering, Markus Michalski, Ulf Engel, Marion Merklein
Proc. ASME. MSEC2015, Volume 1: Processing, V001T02A088, June 8–12, 2015
Paper No: MSEC2015-9206
DOI: https://doi.org/10.1115/MSEC2015-9206
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Topics: Metal foil, Silicon, Stress, Tension, Cutting, Errors, Wear, Blanking (Metalworking), Brittleness, Copper foil
Proceedings Papers

Novel High Pressure Sealing System for Tube Hydroforming Operations

Scott W. Wagner, Kenny Ng, William J. Emblom, Jaime A. Camelio
Proc. ASME. MSEC2013, Volume 1: Processing, V001T01A043, June 10–14, 2013
Paper No: MSEC2013-1194
DOI: https://doi.org/10.1115/MSEC2013-1194
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Topics: High pressure (Physics), Sealing (Process), Fluids, Microelectromechanical systems, Weight (Mass), Automobiles, Automotive industry, Biomedicine, Cavities, Corporate average fuel economy
Proceedings Papers

Design and Fabrication of an Automatic Nanoscale Tool-Tip Exchanger for Scanning Probe Microscopy

Bijoyraj Sahu, Curtis R. Taylor, Robert O. Riddle, Kam K. Leang
Proc. ASME. MSEC2011, ASME 2011 International Manufacturing Science and Engineering Conference, Volume 2, 493-506, June 13–17, 2011
Paper No: MSEC2011-50045
DOI: https://doi.org/10.1115/MSEC2011-50045
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Topics: Design, Manufacturing, Nanoscale phenomena, Scanning probe microscopy, Atomic force microscopy, Microelectromechanical systems, Cantilevers, Damage, Dynamic response, Engineering prototypes
Proceedings Papers

Nanoscale Surface Modifications by Magnetic Field-Assisted Finishing

Raul E. Riveros, Jared N. Hann, Hitomi Yamaguchi, Curtis R. Taylor
Proc. ASME. MSEC2011, ASME 2011 International Manufacturing Science and Engineering Conference, Volume 2, 537-544, June 13–17, 2011
Paper No: MSEC2011-50268
DOI: https://doi.org/10.1115/MSEC2011-50268
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Topics: Finishing, Nanoscale phenomena, Surface roughness, Atomic force microscopy, Electron field emission, Microelectromechanical systems, Optics, Polishing, Scanning electron microscopy, Shapes
Proceedings Papers

Magnetic Field Assisted Finishing of Silicon MEMS Micro-Pore X-Ray Optics

Raul E. Riveros, Hitomi Yamaguchi, Taylor Boggs, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Utako Takagi, Yuichiro Ezoe, Kensuke Ishizu, Teppei Moriyama
Proc. ASME. MSEC2010, ASME 2010 International Manufacturing Science and Engineering Conference, Volume 1, 87-94, October 12–15, 2010
Paper No: MSEC2010-34121
DOI: https://doi.org/10.1115/MSEC2010-34121
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Topics: Finishing, Magnetic fields, Microelectromechanical systems, Silicon, X-ray optics, Finishes, X-rays, Annealing, Atomic force microscopy, Hydrogen
Proceedings Papers

Single Point Diamond Turning Effects on Surface Quality and Subsurface Damage in Ceramics

Deepak Ravindra, John A. Patten, Jun Qu
Proc. ASME. MSEC2009, ASME 2009 International Manufacturing Science and Engineering Conference, Volume 1, 707-713, October 4–7, 2009
Paper No: MSEC2009-84113
DOI: https://doi.org/10.1115/MSEC2009-84113
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Topics: Ceramics, Damage, Diamond turning, Surface quality, Machining, Acoustics, Brittleness, Microscopy, Optical microscopy, Quartz
Proceedings Papers

Emerging Trends in Mechatronics and Smart Manufacturing

Devdas Shetty, Lou Manzione
Proc. ASME. MSEC2009, ASME 2009 International Manufacturing Science and Engineering Conference, Volume 1, 409-418, October 4–7, 2009
Paper No: MSEC2009-84231
DOI: https://doi.org/10.1115/MSEC2009-84231
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Topics: Manufacturing, Mechatronics, Modeling, Computers, Control systems, Electronics, Engineering simulation, Flight, Machinery, Microelectromechanical systems
Proceedings Papers

An Innovative Polymeric Material for Microhandling

Claudia Pagano, Irene Fassi
Proc. ASME. MSEC2008, ASME 2008 International Manufacturing Science and Engineering Conference, Volume 2, 359-365, October 7–10, 2008
Paper No: MSEC_ICM&P2008-72485
DOI: https://doi.org/10.1115/MSEC_ICMP2008-72485
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Topics: Advanced materials, Aeronautics, Aerospace industry, Airbags, Automobiles, Biomedicine, Cooling, Dampers, Design, Disks
Proceedings Papers

Improving the Surface Roughness of a CVD Coated Silicon Carbide Disk by Performing Ductile Regime Single Point Diamond Turning

Deepak Ravindra, John Patten
Proc. ASME. MSEC2008, ASME 2008 International Manufacturing Science and Engineering Conference, Volume 1, 155-161, October 7–10, 2008
Paper No: MSEC_ICM&P2008-72145
DOI: https://doi.org/10.1115/MSEC_ICMP2008-72145
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Topics: Chemical vapor deposition, Diamond turning, Disks, Silicon, Surface roughness, Machining, Surface quality, Brittleness, Ceramics, Diamond tools
Proceedings Papers

Robust Direct-Write Dispensing Tool and Solutions for Micro/Meso-Scale Manufacturing and Packaging

B. Li, P. A. Clark, K. H. Church
Proc. ASME. MSEC2007, ASME 2007 International Manufacturing Science and Engineering Conference, 715-721, October 15–18, 2007
Paper No: MSEC2007-31037
DOI: https://doi.org/10.1115/MSEC2007-31037
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Topics: Manufacturing, Packaging, Electroplating, Microelectromechanical systems, Chemical vapor deposition, Lithography, Microfabrication, Needles, Chemical etching, Electroforming
Proceedings Papers

Development of a Highly Miniaturized PQT-Sensor for Monitoring and Diagnosing of Pneumatic Systems

Christoph Sosna, Rainer Buchner, Walter Lang, Wolfgang Benecke, Christian Boehm, Josef Binder
Proc. ASME. MSEC2007, ASME 2007 International Manufacturing Science and Engineering Conference, 455-464, October 15–18, 2007
Paper No: MSEC2007-31017
DOI: https://doi.org/10.1115/MSEC2007-31017
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Topics: Pneumatic systems, Sensors, Flow (Dynamics), Microelectromechanical systems, Pressure, Temperature, Design, Micromachining, Resolution (Optics)