Abstract
Laser Induced Plasma MicroMachining (LIPMM) uses a pulsed laser to create a plasma spot inside a dielectric liquid and then uses this plasma for machining. Compared to direct laser machining LIPMM enables a wider multimaterial capability, greater machined depth for the same width, lesser damage, and greater throughput. This paper explores Magnetically assisted Laser Induced Plasma MicroMachining (M-LIPMM) in which an external magnetic field is applied to the plasma during machining. We focus on the effects of using a single magnet. The dimensions of the machined features are characterized as a function of the magnetic pole orientation, pulse energy, laser speed, and pulse frequency. We find that M-LIPMM adds an effective magnetic lens to a laser that allows concurrent width reduction and depth increase, greater throughput, and enhanced geometric flexibility, beyond the capabilities of LIPMM.
