In this paper, the commercial FEM software package Abaqus is employed to model a novel nanomachining process, in which an atomic force microscope (AFM) is used as a platform and the nano abrasives injected in slurry between the workpiece and the vibrating AFM probe impact the workpiece and result in nanoscale material removal. Diamond particles are used as loose abrasives. The ductile material model is used to describe the behavior of the silicon workpiece. The effects of impact speed, impact angle, and the frictional coefficient between the workpiece and abrasives on material removal mechanism are investigated. It is found that the impact speed, impact angle, and frictional coefficient between the silicon workpiece and nanoabrasives have big influence on material removal volume in this novel nanomachining process.
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ASME 2018 13th International Manufacturing Science and Engineering Conference
June 18–22, 2018
College Station, Texas, USA
Conference Sponsors:
- Manufacturing Engineering Division
ISBN:
978-0-7918-5138-8
PROCEEDINGS PAPER
Numerical Investigation of the Damage Evolution in Vibration Assisted Nano Impact Machining by Loose Abrasives With Different Operating Parameters
Nick H. Duong,
Nick H. Duong
Saint Louis University, Saint Louis, MO
Search for other works by this author on:
Shuting Lei
Shuting Lei
Kansas State University, Manhattan, KS
Search for other works by this author on:
Nick H. Duong
Saint Louis University, Saint Louis, MO
J. Ma
Saint Louis University, Saint Louis, MO
Shuting Lei
Kansas State University, Manhattan, KS
Paper No:
MSEC2018-6474, V004T03A028; 7 pages
Published Online:
September 24, 2018
Citation
Duong, NH, Ma, J, & Lei, S. "Numerical Investigation of the Damage Evolution in Vibration Assisted Nano Impact Machining by Loose Abrasives With Different Operating Parameters." Proceedings of the ASME 2018 13th International Manufacturing Science and Engineering Conference. Volume 4: Processes. College Station, Texas, USA. June 18–22, 2018. V004T03A028. ASME. https://doi.org/10.1115/MSEC2018-6474
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