In this paper, the commercial FEM software package Abaqus is employed to model a novel nanomachining process, in which an atomic force microscope (AFM) is used as a platform and the nano abrasives injected in slurry between the workpiece and the vibrating AFM probe impact the workpiece and result in nanoscale material removal. Diamond particles are used as loose abrasives. The ductile material model is used to describe the behavior of the silicon workpiece. The effects of impact speed, impact angle, and the frictional coefficient between the workpiece and abrasives on material removal mechanism are investigated. It is found that the impact speed, impact angle, and frictional coefficient between the silicon workpiece and nanoabrasives have big influence on material removal volume in this novel nanomachining process.

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