In this paper, the commercial FEM software package Abaqus is employed to model the novel nanomachining process, Vibration Assisted Nano Impact machining by Loose Abrasives (VANILA), which combines the principles of vibration-assisted abrasive machining and tip-based nanomachining to conduct nano abrasive machining of hard and brittle materials. In this novel nanomachining process, an atomic force microscope (AFM) is used as a platform and the nano abrasives injected in slurry between the workpiece and the vibrating AFM probe impact the workpiece and result in nanoscale material removal. Diamond particles are used as the loose abrasives. The effects of impact speed, angle of impacts, and the frictional coefficient between the workpiece and abrasives are investigated using Abaqus. It is found that the impact speed, impact angle, and frictional coefficient between the silicon workpiece and nanoabrasives have big influence on the nanocavity’s size and depth.

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