Chemo-thermal micro-machining is a hybrid method of micro fabrication achieved by integrating laser based thermal ablation and chemical etching. Material removal in this process involves focussing laser beam on a glass specimen submerged in aqueous sodium hydroxide (NaOH) solution that causes chemical degradation of glass along with thermal ablation at the laser target point. Though laser by itself is capable of machining numerous materials, it often causes micro fractures radially along the machined surface, especially when used on glass. In the proposed process, continuous waves of carbon dioxide laser (10.6 μm wavelength) with varying power are irradiated on the surface of borosilicate glass slide immersed in 1M NaOH solution for varying duration of exposure. This resulted in smaller hole diameter and better surface finish in the micro machining of glass, as compared to machining by laser beam alone.

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