Recent developments in science and engineering have advanced the fabrication techniques for micro/nanodevices. Among them, atomic force microscope (AFM) has already been used for nanomachining and fabrication of micro/nanodevices. In this paper, a computational model for AFM-based nanofabrication processes is being developed. Molecular Dynamics (MD) technique is used to model and simulate mechanical indentation and scratching at the nanoscale. The effects of AFM-tip radius and crystal orientation are investigated. The simulation is also used to study the effect of the AFM tip speed on the indentation force at the interface between the tip and the substrate/workpiece The material deformation and indentation geometry are extracted from the final locations of atoms, which are displaced by the rigid indenter. Material properties including modulus of elasticity and hardness are estimated. It is found that properties vary significantly at the nanoscale. AFM is used to conduct actual nanoindentation and scratching, to validate the MD simulation. Qualitative agreement is found. Finally, AFM-based fabrication of nanochannels/nanofluidic devices is conducted using different applied forces, scratching length, and feed rate.
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ASME 2013 International Manufacturing Science and Engineering Conference collocated with the 41st North American Manufacturing Research Conference
June 10–14, 2013
Madison, Wisconsin, USA
Conference Sponsors:
- Manufacturing Engineering Division
ISBN:
978-0-7918-5546-1
PROCEEDINGS PAPER
AFM-Based Nanofabrication: Modeling, Simulation, and Experimental Verification
Rapeepan Promyoo,
Rapeepan Promyoo
Indiana University Purdue University Indianapolis, Indianapolis, IN
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Hazim El-Mounayri,
Hazim El-Mounayri
Indiana University Purdue University Indianapolis, Indianapolis, IN
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Varun Kumar Karingula,
Varun Kumar Karingula
Indiana University Purdue University Indianapolis, Indianapolis, IN
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Kody Varahramyan
Kody Varahramyan
Indiana University Purdue University Indianapolis, Indianapolis, IN
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Rapeepan Promyoo
Indiana University Purdue University Indianapolis, Indianapolis, IN
Hazim El-Mounayri
Indiana University Purdue University Indianapolis, Indianapolis, IN
Varun Kumar Karingula
Indiana University Purdue University Indianapolis, Indianapolis, IN
Kody Varahramyan
Indiana University Purdue University Indianapolis, Indianapolis, IN
Paper No:
MSEC2013-1091, V002T03A003; 10 pages
Published Online:
November 27, 2013
Citation
Promyoo, R, El-Mounayri, H, Karingula, VK, & Varahramyan, K. "AFM-Based Nanofabrication: Modeling, Simulation, and Experimental Verification." Proceedings of the ASME 2013 International Manufacturing Science and Engineering Conference collocated with the 41st North American Manufacturing Research Conference. Volume 2: Systems; Micro and Nano Technologies; Sustainable Manufacturing. Madison, Wisconsin, USA. June 10–14, 2013. V002T03A003. ASME. https://doi.org/10.1115/MSEC2013-1091
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