Recently, atomic force microscopy (AFM) has been widely used for nanomachining and fabrication of micro/ nanodevices. This paper describes the development and validation of computational models for AFM-based nanomachining (nanoindentation and nanoscratching). The Molecular Dynamics (MD) technique is used to model and simulate mechanical indentation and scratching at the nanoscale in the case of gold and silicon. The simulation allows for the prediction of indentation forces and the friction force at the interface between an indenter and a substrate. The effects of tip curvature and speed on indentation force and friction coefficient are investigated. The material deformation and indentation geometry are extracted based on the final locations of atoms, which are displaced by the rigid tool. In addition to modeling, an AFM was used to conduct actual indentation at the nanoscale, and provide measurements to validate the predictions from the MD simulation. The AFM provides resolution on nanometer (lateral) and angstrom (vertical) scales. A three-sided pyramid indenter (with a radius of curvature ∼ 50 nm) is raster scanned on top of the surface and in contact with it. It can be observed from the MD simulation results that the indentation force increases as the depth of indentation increases, but decreases as the scratching speed increases. On the other hand, the friction coefficient is found to be independent of scratching speed.
Skip Nav Destination
ASME 2011 International Manufacturing Science and Engineering Conference
June 13–17, 2011
Corvallis, Oregon, USA
Conference Sponsors:
- Manufacturing Engineering Division
ISBN:
978-0-7918-4431-1
PROCEEDINGS PAPER
Molecular Dynamics Simulation of AFM-Based Nanomachining Processes Available to Purchase
Rapeepan Promyoo,
Rapeepan Promyoo
Indiana University Purdue University Indianapolis, Indianapolis, IN
Search for other works by this author on:
Hazim El-Mounayri,
Hazim El-Mounayri
Indiana University Purdue University Indianapolis, Indianapolis, IN
Search for other works by this author on:
Kody Varahramyan,
Kody Varahramyan
Indiana University Purdue University Indianapolis, Indianapolis, IN
Search for other works by this author on:
Ashlie Martini
Ashlie Martini
Purdue University, West Lafayette, IN
Search for other works by this author on:
Rapeepan Promyoo
Indiana University Purdue University Indianapolis, Indianapolis, IN
Hazim El-Mounayri
Indiana University Purdue University Indianapolis, Indianapolis, IN
Kody Varahramyan
Indiana University Purdue University Indianapolis, Indianapolis, IN
Ashlie Martini
Purdue University, West Lafayette, IN
Paper No:
MSEC2011-50270, pp. 545-554; 10 pages
Published Online:
September 14, 2011
Citation
Promyoo, R, El-Mounayri, H, Varahramyan, K, & Martini, A. "Molecular Dynamics Simulation of AFM-Based Nanomachining Processes." Proceedings of the ASME 2011 International Manufacturing Science and Engineering Conference. ASME 2011 International Manufacturing Science and Engineering Conference, Volume 2. Corvallis, Oregon, USA. June 13–17, 2011. pp. 545-554. ASME. https://doi.org/10.1115/MSEC2011-50270
Download citation file:
11
Views
Related Proceedings Papers
Related Articles
Ab Initio Molecular Dynamics Study of Nanoscale Thermal Energy Transport
J. Heat Transfer (December,2008)
Mechanical Properties and Strain Transfer Behavior of Molybdenum Ditelluride (MoTe 2 ) Thin Films
J. Eng. Mater. Technol (January,2022)
Adhesion and Interface Properties of Polydopamine and Polytetrafluoroethylene Thin Films
J. Appl. Mech (December,2020)
Related Chapters
Data Tabulations
Structural Shear Joints: Analyses, Properties and Design for Repeat Loading
Effect of Temperature and Irradiation on the Hardness of δ-Zr Hydride
Zirconium in the Nuclear Industry: 20th International Symposium
Part III Some Practical Advice
The Elements of Mechanical Design