Modular and Reconfigurable 3D Micro-Optical Benches: Concept, Validation, and Characterization

In this paper, we present an approach to design MOEMS based on Reconfigurable Free Space Micro-Optical Benches (RFS-MOB). The proposed concept enables to design modular and reconfigurable MOEMS by using a generic structure of silicon holders and non defined position in the substrate. Various micro-optical elements, e.g. microlenses or micromirrors, can be integrated within holders. Their assembly is achieved with an active microgripper, after high precision alignement within guiding rails of silicon substrate. Flexible parts are used to maintain a final position. The concept is validated by successful assembly of holders. A characterization method of assembled holders is proposed and provides an accuracy better than ± 0.04° for an angle measurement.