In this paper, we present an approach to design MOEMS based on Reconfigurable Free Space Micro-Optical Benches (RFS-MOB). The proposed concept enables to design modular and reconfigurable MOEMS by using a generic structure of silicon holders and non defined position in the substrate. Various micro-optical elements, e.g. microlenses or micromirrors, can be integrated within holders. Their assembly is achieved with an active microgripper, after high precision alignement within guiding rails of silicon substrate. Flexible parts are used to maintain a final position. The concept is validated by successful assembly of holders. A characterization method of assembled holders is proposed and provides an accuracy better than ± 0.04° for an angle measurement.
ASME 2011 International Manufacturing Science and Engineering Conference
June 13–17, 2011
Corvallis, Oregon, USA
Conference Sponsors:
- Manufacturing Engineering Division
ISBN:
978-0-7918-4431-1
PROCEEDINGS PAPER
Modular and Reconfigurable 3D Micro-Optical Benches: Concept, Validation, and Characterization
K. Rabenorosoa
,
K. Rabenorosoa
FEMTO-ST Inst., Besancon, France
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C. Cle´vy
,
C. Cle´vy
FEMTO-ST Inst., Besancon, France
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S. Bargiel
,
S. Bargiel
FEMTO-ST Inst., Besancon, France
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J. P. Mascaro
,
J. P. Mascaro
FEMTO-ST Inst., Besancon, France
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P. Lutz
,
P. Lutz
FEMTO-ST Inst., Besancon, France
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C. Gorecki
C. Gorecki
FEMTO-ST Inst., Besancon, France
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Author Information
K. Rabenorosoa
FEMTO-ST Inst., Besancon, France
C. Cle´vy
FEMTO-ST Inst., Besancon, France
S. Bargiel
FEMTO-ST Inst., Besancon, France
J. P. Mascaro
FEMTO-ST Inst., Besancon, France
P. Lutz
FEMTO-ST Inst., Besancon, France
C. Gorecki
FEMTO-ST Inst., Besancon, France
Paper No:
MSEC2011-50160, pp. 479-485; 7 pages
Published Online:
September 14, 2011
Citation
Rabenorosoa, K., Cle´vy, C., Bargiel, S., Mascaro, J. P., Lutz, P., and Gorecki, C. "Modular and Reconfigurable 3D Micro-Optical Benches: Concept, Validation, and Characterization." Proceedings of the ASME 2011 International Manufacturing Science and Engineering Conference. ASME 2011 International Manufacturing Science and Engineering Conference, Volume 2. Corvallis, Oregon, USA. June 13–17, 2011. pp. 479-485. ASME. https://doi.org/10.1115/MSEC2011-50160
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