Recently micro cutting has been applied to manufacturing of micro devices. Burr formation is a troublesome problem in micro cutting. From the point of view of the required accuracy, burr removal in the micro manufacturing cannot be performed by the manual operations or the additional cuttings. The paper presents a deburring process to remove the burrs on the micro-scale structured surfaces, which are machined in micro milling. In order to remove the burrs on the pillars in the structures, the study examines burr removal milling, polishing and water jet finishing. Burr removal milling leaves the cutter traces with adhesion of the chips on the pillars. Polishing finishes the surfaces with removing the burrs on the top of the pillars. A supporting device is used for protecting the edge shapes of the pillars in polishing. Then, the burrs on the side of the pillars can be removed in water jet finishing. A water jet machine driven by a low pressure pump is developed to remove the burrs without losing their shapes. The process sequence of polishing and water jet finishing is effective in removing the burrs in micro milling. The presented process is discussed to manufacture the micro-scale structures in mechanical manner based on the axiomatic design.
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ASME 2010 International Manufacturing Science and Engineering Conference
October 12–15, 2010
Erie, Pennsylvania, USA
Conference Sponsors:
- Manufacturing Engineering Division
ISBN:
978-0-7918-4946-0
PROCEEDINGS PAPER
Deburring of Micro-Scale Structures Machined in Milling Available to Purchase
Takashi Matsumura,
Takashi Matsumura
Tokyo Denki University, Tokyo, Japan
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Tsuyoshi Konno,
Tsuyoshi Konno
Tokyo Denki University, Tokyo, Japan
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Shouta Tobe,
Shouta Tobe
Tokyo Denki University, Tokyo, Japan
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Takafumi Komatsu
Takafumi Komatsu
Komatsu Seiki Kosakusho Co., Ltd., Suwa, Nagano, Japan
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Takashi Matsumura
Tokyo Denki University, Tokyo, Japan
Tsuyoshi Konno
Tokyo Denki University, Tokyo, Japan
Shouta Tobe
Tokyo Denki University, Tokyo, Japan
Takafumi Komatsu
Komatsu Seiki Kosakusho Co., Ltd., Suwa, Nagano, Japan
Paper No:
MSEC2010-34149, pp. 105-112; 8 pages
Published Online:
April 11, 2011
Citation
Matsumura, T, Konno, T, Tobe, S, & Komatsu, T. "Deburring of Micro-Scale Structures Machined in Milling." Proceedings of the ASME 2010 International Manufacturing Science and Engineering Conference. ASME 2010 International Manufacturing Science and Engineering Conference, Volume 1. Erie, Pennsylvania, USA. October 12–15, 2010. pp. 105-112. ASME. https://doi.org/10.1115/MSEC2010-34149
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