Mechanical Properties of PDMS and Influences by Micromachining Processes

Microfluidics is both a science and a technology that offers great and perhaps even revolutionary capabilities to impact the society in the future. Polydimethylsiloxane (PDMS) has been widely used in fabricating microfluidic systems but few efforts were made in the past on mechanical properties of PDMS. Very importantly there is no report on influences of microfabrication processes which normally involve chemical reaction processes. A comprehensive investigation was made by authors to study fundamental issues regarding chemical emersion and their effects on mechanical properties of PDMS. Results shown in this work can be used to guide future developments of microfluidics in utilizing PDMS especially those devices involve actuation of PDMS membranes.